Advances in Surface Science by Hari Singh Naiwa (Eds.)

By Hari Singh Naiwa (Eds.)

Floor technological know-how has a variety of purposes that come with semiconductor processing, catalysis, vacuum expertise, microelectronics, flat-panel screens, compact disks, televisions, desktops, environmental tracking of pollution, biomaterials, synthetic joints, gentle tissues, nutrition security, pharmacy, and plenty of more.This quantity is meant for upper-level undergraduate and graduate scholars in universities, person learn teams and researchers engaged on surfaces of fabrics. it really is of curiosity to chemists, solid-state physists, fabrics scientists, floor chemists, polymer scientists, electric engineers, chemical engineers, and everybody thinking about fabrics technological know-how

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Be varied. This experimental scheme was introduced as ICISS (impact collision scattering spectrometry) [44, 45]. Figure 12 shows the concept behind such an experiment. It is obvious that the experiment can serve a number of purposes. For a known surface lattice constant d the shadow cone radius re is measured. Hence, the shadow cone can be numerically calculated and fitted to the experiment. In essence, the shadow cone is calibrated from a known structure and can be used for further measurements for a given experimental situation, that is, target, projectile, energy, scattering angle, etc.

I ' i , i ' ! 2 (b) ' ! 4 10-s O a 0 I 200 n I i I 400 600 Depth [A] 800 O . O 1000 (c) FIG. 16. (a) Depth profile using 3 keV Cs + projectiles of a focused ion beam implant of 25 keV Ga+ in InP monitoring GaCs + and InCs + ions. (b) Correlation of the signals shown in (a); the slope yields the relative sensitivity factor SGaCs/SInCs- (c) The SIMS data of (a) converted into the Ga concentration distribution using the factors derived in (b) [59]. Reprinted with permission from H.

An example for a depth profile SNMS analysis shows Figurel5 [57]. 6 ~. Because W-Si is insulating the sputtering was performed with Ar gas discharge. The plasma source provides a very low primary energy distribution, which in turn causes very uniform sputtering. In addition, the intermixing of the species in the sample is reduced at low primary energies, which the serves to keep the depth resolution high even into great depths. Another benefit of low energy is the finding that in many cases the sputtering craters remain flat, which also contributes to good depth resolution.

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